Wafer appearance inspection device (automatic visual inspection device)
Automating visual inspection of wafer defects.
■This is a device that responds to the following requests and issues! - We want to automate visual inspection of wafer (substrate) defects. - We want to reduce and prevent variations in pass/fail judgments among inspectors. - We want to save inspection data and trace quality. - We want to automatically discriminate defects. ■Features of the device - It can automatically detect, extract, and discriminate visually identifiable defects. - We can propose an optical system optimized for the types of defects. - We can propose both manual and automatic transport (cassette to cassette). - It also implements AI functions, allowing for improved defect discrimination accuracy through ongoing learning.
- Company：クボタ計装
- Price：Other
